Compact with Motorized stage
|
Travel Range |
20mm |
|
Resolution |
0.125μm |
|
Repeatability |
＜1μm |
|
Straightness |
＜2μm |
|
Parallelism |
＜5μm |
|
Pitching |
10″（50μrad） |
|
Yawing |
10″（50μrad） |
|
Maximum Speed |
5mm/sec |
|
Load Capacity |
10kg |
|
Weight |
1.5kg |